The Sloan metalization system contains two dc magnetron sputter heads which may be run separately or together. The system is used to sputter metallic films of Al, Cu, Ta, W, V, Ti, Mo, and Pd. It was most recently used by a student to make palladium thin films for studying the solubility of hydrogen in palladium.
The vacuum system is a standard, 6-in. diffusion pump with a liquid nitrogen cold trap. With its present sample holder we are able to uniformly coat a 2 in. diameter area with metal from either target.